- •36”
optical coating chamber with all dry-pumping system and cryogenic
cooling (for water vapor trapping) capability.
- Ebeam evaporation with Ion Assisted Deposition option.
- •In-situ
optical monitoring and spectra measurement.
- Thin film software for optical design and simulation.
- •Calibrated
materials including MgF2, SiO2, Al2O3, ZrO2, Ta2O5, TiO2, Si, et al.
•
.
•